| 摘要 |
PURPOSE:To form the title high-quality thin film of a metal compd. decomposition product on the surface of a substrate with good adhesion and at a low cost by dispersing a specified hydrolyzable metal compd. in a gas by an ultrasonic vibrator, and bringing the obtained aerosol into contact with the substrate surface. CONSTITUTION:One or more kinds of hydrolyzable metal compds. (e.g., aluminum isopropoxide and tin octanate) selected from a metal alkoxide, a metal chelate compd., a metal carboxylate, and a metal nitrate are prepared. The hydrolyzable metal compd. is dispersed in a gas by an ultrasonic vibrator. The obtained aerosol is transferred by a carrier gas and brought into contact with the substrate surface, and the thin film of the metal compd. decomposition product is formed on the substrate surface. A compd. which is liq. at ordinary temp. or at the working temp. can be formed into a thin film without using a solvent by this method, and the unevenness in coating due to the volatilization of a solvent can be avoided. |
