REFLECTION PREVENTING TYPE VEHICLE FILM AND PRODUCTION THEREOF

摘要

PURPOSE:To obtain the titled film for dust cover such as photo mask, by forming a thin film of a cellulose derivative on a substrate and feeding a fluorine based solvent solution of polyfluoro(meth)acrylate on the above-mentioned thin film and forming a reflection preventing layer. CONSTITUTION:A cellulose derivative solution is fed on a substrate and a thin film of cellulose derivative is formed by a rotation film forming method and dried and a polymer solution obtained by dissolving (A) polyfluoro(meth)acrylate consisting of a monomer expressed by formula I or formula II (R<1> and R<2> are fluoroalkyl may contain ether oxygen atom) and having >=50wt.% fluorine content in the polymer in a solvent consisting of (B) methaxylenehexafluoride, benzotrifluoride or tetrafluoride propanol is fed on the above-mentioned thin film of cellulose derivative and a reflection preventing layer is formed by a rotation film forming method to provide the aimed reflection preventing type vehicle.