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发明名称
GAS PHASE ION SOURCE
摘要
申请公布号
JPS6414850(A)
申请公布日期
1989.01.19
申请号
JP19870170431
申请日期
1987.07.08
申请人
JEOL LTD
发明人
AIHARA RYUZO;NAGAFUNE TADAYOSHI;SAKUMA YOSHIZO
分类号
H01J27/26;H01J37/08
主分类号
H01J27/26
代理机构
代理人
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