| 发明名称 |
METHOD AND APPARATUS FOR REDUCING TEMPERATURE VARIATIONS ACROSS A SEMICONDUCTOR WAFER DURING HEATING |
| 摘要 |
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| 申请公布号 |
EP0182870(B1) |
申请公布日期 |
1989.01.18 |
| 申请号 |
EP19850902835 |
申请日期 |
1985.05.17 |
| 申请人 |
AMERICAN TELEPHONE AND TELEGRAPH COMPANY |
发明人 |
LORD, HERBERT, ALAN |
| 分类号 |
H01L21/18;C30B13/06;C30B13/24;C30B33/02;H01L21/20;H01L21/324;(IPC1-7):C30B13/24 |
主分类号 |
H01L21/18 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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