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发明名称
BEAM DRAWING-OUT METHOD OF FIELD EMISSION TYPE ION SOURCE
摘要
申请公布号
JPS6410546(A)
申请公布日期
1989.01.13
申请号
JP19870164937
申请日期
1987.07.01
申请人
DENKI KAGAKU KOGYO KK
发明人
TSUNODA KATSUYOSHI;HAGIWARA HIROTOSHI
分类号
H01J37/08;H01J27/26
主分类号
H01J37/08
代理机构
代理人
主权项
地址
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