| 摘要 |
PURPOSE:To surely fix an actuator without using an adhesive agent, and also, without exerting an undesirable influence on a displacement mechanism, by providing an abutting member for abutting on the end of the actuator through the second elastic member, on the first rigid body part, and pressing this abutting member by a wedge mechanism. CONSTITUTION:When a wedge 17b is pushed into a groove 17a1 in a state that a piezoelectric actuator 6 has been inserted and held between a fine motion table 2 and an abutting member 15, an elastic hinge 1b is bent to the left, and accordingly, the abutting member 15 is pressed against the right end face of the piezoelectric actuator 6. In such a way, the piezoelectric actuator 6 is fixed surely between the fine motion table 2 and the abutting member 15. Also, the reaction force at the time of tightening the piezoelectric actuator 6 by a wedge mechanism 17 is obtained by a deformation of parallel springs 3a, 3b and the elastic hinge 1b. In such a case, the parallel springs 3a, 3b are deformed a little, but this deformation allows the fine motion table 2 to only generate a small translational displacement, and in case when positioning is executed, no undesirable influence is exerted. |
