PROCESS AND APPARATUS FOR IGNITING AN ULTRA-HIGH FREQUENCY ION SOURCE

摘要

16 Process and apparatus for igniting an ultra-high frequency ion source. The process for igniting an ultra-high frequency ion source using in per se known manner a resonator cavity supplied by the gas or a vapour of a material for forming a plasma, a system for injecting ultra-high frequency power into the cavity and a system for extracting ions of the plasma into the cavity is characterized in that, as the cavity is of the multimode type, within the medium to be ionized are produced electron nuclei and the plasma is preserved following its ignition with the aid of the ultra-high frequency power only.