Device for testing integrated circuits

摘要

The device is for a machine used in inspecting integrated circuits and comprises (a) a body 10 carrying both a dielectric plate 12 with a set of microstrip lines 13 on one surface and a set of connectors 14 equal in number to the said lines and connected electrically to them; (b) a flexible specimen 20 carrying microstrip lines 22 on one surface and a metallised earth plane 21 on the other surface facing the integrated circuit under test, the said microstrip lines 22 of the specimen crossing the latter into its central part as far as studs 24 intended for establishing contact with the connecting areas of the integrated circuit and also being connected electrically to the microstrip lines 22 in order to establish electrical continuity between the studs 24 and the connectors 14; and (c) means for pressing the specimen 20 against the integrated circuit under test. Application to machines for inspecting integrated circuits. <IMAGE>