| 摘要 |
PURPOSE:To obtain a laser type of light weight and small size with stable operation by monolithically providing a laser, a grating, a photodiode, a prism, a signal processing IC and the like on a semiconductor substrate. CONSTITUTION:Since an optical path 5 has a refractive index larger than a substrate or vacuum, a light is enclosed in the path 5 to form a ring-shaped resonator. When a current larger than the prescribed value is flowed to a P-N junction 3, the laser is oscillated in a ring shape, and two light beams of clockwise and counterclockwise are produced. Part of the counterclockwise light is reflected on a waveguide type prism 8, a grating 4 is diffracted, incident to a photodiode 9, and part of the clockwise light is passed through the grating 4 directly into the photodiode 9. When the entire device is rotated at the angular velocity OMEGA, the oscillating frequency of clockwise light becomes slightly different. Since the lights of two directions are simultaneously incident to the photodiode 9, the output is varied as the beam frequency, and the angular velocity OMEGA can be notified by measuring the frequency. |
