发明名称 SEMICONDUCTOR LASER DEVICE AND MANUFACTURE THEREOF
摘要 PURPOSE:To obtain a laser high in reliability even though it is operated for a long period, preventing radiation laser from reaching to a re-growth interface by a method wherein impurity in a current block layer is made to be diffused into a clad layer just under the block layer. CONSTITUTION:A p-type AlGaAs first clad layer 2, a p-type AlGaAs active layer 3, an n<+>-type AlGaAs second clad layer 4, an n-type AlGaAs third clad layer 5, and a p<+>-type GaAs current block layer 6 are formed on a p-type GaAs substrate 1 and the block layer 6 is etched along the direction of a resonator for the formation of a stripe-like groove 13. Next, the substrate 1 is subjected to heat treatment so as to diffuse impurity in the block layer 6 into the third clad layer 5 for the formation of an n-type reverse layer 12. Next an n-type AlGaAs fourth clad layer 7, an n-type GaAs contact layer 8, and electrodes 9 and 10 are formed. The distance between the active layer 3 and the re-growth interface 11 is made to be longer through forming a reverse layer 12 so as to constrict the current, and thus the interface is protected against deterioration due to laser radiation reaching the interface.
申请公布号 JPS63318191(A) 申请公布日期 1988.12.27
申请号 JP19870154105 申请日期 1987.06.19
申请人 MITSUBISHI ELECTRIC CORP 发明人 NAGAI YUTAKA
分类号 H01S5/00 主分类号 H01S5/00
代理机构 代理人
主权项
地址