| 摘要 |
PURPOSE:To reduce the damage of an object to be inspected due to too little or excessive pressing force to a large extent, by providing a fluid pressure control means for making the pressure of a fluid becoming the drive source of a press driving part variable by an electric signal. CONSTITUTION:Numerical value data is operated and inputted from a keyboard 51 in order to press a film electrode after the film electrode 11 is placed on the electrode of an LCD 10. This data is inputted to a CPU 50 and digital output is converted to an analogue signal by a D/A converter to be applied to the force motor of an electropneumatic regulator 40. The air pressure corresponding to a set electric signal is outputted and the pressing force of an air cylinder 30 is determined. When the air cylinder 30 is driven, the revolving arm of a pressing part 20 is revolved and the film electrode 11 is pressed to each electrode by the press pad provided to the leading end of the revolving arm.
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