| 摘要 |
PURPOSE:To enable detection and control of a position at a very high accuracy, by forming magnetic anisotropy of a magnetoresistance effect element (MR element) diametrically as opposed to a rotor magnetized circumferentially. CONSTITUTION:When an MR film 12 is formed on a substrate 1, a magnetic field generation source 5 is set on the back of the substrate 1 to generate a magnetic field diametrically in a radial manner. According to this method, a radial magnetic anisotropy is formed diametrically without being affected by a magnetic anisotropy as formed by incident and geometric effect during the formation of the film. Then, a pattern of a zigzag-shaped MR element 2 is formed by etching technique. When utilized for a surface opposed type sensor, this achieves a remarkably higher performance, thereby enabling detection and control of a position at a very high accuracy.
|
