| 摘要 |
PURPOSE:To easily measure the hydraulic pressure in a pipe even in a narrow place by putting an extremely small semiconductor pressure sensor airtightly in the wall surface of the pipe. CONSTITUTION:A hole 22 is bored in the pipe 20, and the pressure sensor 30 is fitted therein airtightly and fixedly with, for example, resin 24 so that its pressure reception surface 40 is exposed in the internal surface of the pipe 20. Then this pipe 20 is connected at a specific place of piping to be measured. A power source (DC, constant current, or constant voltage) is connected to a power source terminal 44 which is exposed outside and a voltmeter is connected to an output terminal 42. At this time, the power source and voltmeter can be installed at optional proper positions by using wiring. Then when the hydraulic pressure P in the piping is applied to the pressure reception surface 40, it is transmitted to a chip 36 through a resin elastomer 38 to cause variation in resistance value, which is led out to the output terminal 42 as voltage or current variation proportional to the pressure P, so that the variation is measured by the voltmeter, etc.
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