| 摘要 |
PURPOSE:To have no influence of liquid pressure and dynamic pressure produced by flowing of a fluid by providing a plurality of movable plates which are flexed in the direction of board thickness when voltage is applied, valve elements and valve ports confronting a part of a moving path for the valve elements. CONSTITUTION:When voltage is applied, the movable plates of plural movable plates 10 to which voltage is applied are flexed in the direction of board thickness and shifted laterally, confronting valve element 14 and valve ports 15. The flexure of the movable plates 10 is changed depending upon the magnitude of voltage to change the opening degree of the valve ports 15. As the valve elements 14 are disposed vertically to a flexible shaft 12 on extension substantially parallel to a flexible shaft of the movable plates 10, dynamic pressure produced by flowing of a fluid exerts stress in the direction substantially parallel to the flexible shaft 12 of the movable plates 10 through the valve elements 14. The rigidity for bending stress in the direction substantially parallel to the flexible shaft 12 of the movable plate 10 is large to hardly be influenced by dynamic pressure.
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