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发明名称
MANUFACTURE OF INDIUM-TIN-OXIDE LAYER
摘要
申请公布号
JPS63312964(A)
申请公布日期
1988.12.21
申请号
JP19880135378
申请日期
1988.06.01
申请人
SIEMENS AG
发明人
UERUNAA MIYURAA
分类号
C23C14/00;C23C14/08;C23C14/58;G03G5/10;H01L31/04;H01L31/18
主分类号
C23C14/00
代理机构
代理人
主权项
地址
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