| 摘要 |
PURPOSE:To improve a workability and achieve labor-savings by a method wherein, if the defect of the pattern is a lacking defect, the defect is corrected by a compression bonding means with a ribbon supplied from a supply means and, if the defect is a residue defect, the residue is scraped off by a cutting means. CONSTITUTION:If a defective pattern has a lacking defect, a ribbon bonder is selected by a tool changing mechanism. A thermocompression bonding electrode 28 is positioned directly above the defective pattern 34. The tip of a conductive ribbon 30 is supplied between the thermocompression bonding electrode 28 and the defective pattern 34 by the rotation of the pulley 38 of a ribbon feeder 26 and pressed against the defective pattern 34 by the thermocompression bonding electrode 28. A current is applied to the thermocompression bonding electrode 28 and the ribbon 30 is thermally bonded to the defective pattern 34. Then, the ribbon 30 is cut off by a cutter blade 50 on the inclined table 36 of the ribbon feeder 26. On the other hand, if a residue defect of a defective pattern is to be corrected, the blade 62 of an ultrasonic cutter 60 is moved on the residue defect, while the blade 62 is brought into contact with the residue defect, to scrape the residue off. With this constitution, a workability can be improved and labor-savings can be achieved. |
