摘要 |
PURPOSE:To integrate many Josephson elements as an array in a small occupying area by reducing the thickness of a film by a semiconductor technique and stereoscopically composing it. CONSTITUTION:Superconductor layers 21-25 and insulator layers 31-34 are so sequentially laminated on a substrate 1 as to hold the layers 31-34 by the layers 21-25, and integrally formed as a laminate 4. One end of the laminate 4 is formed as a laminated layer end face 5 having a predetermined region. A conductor layer 6 is formed of a superconductor layer formed in a striplike state on the end face 5, and the layers 21-25 for holding the layers 31-34 are weakly bonded through the layer 6. Thus, a Josephson effect device of an array structure in which many Josephson elements having small occupying area with small size to obtain sufficient interference between the sole Josephson elements are connected in series can be obtained. |