发明名称 PLASMA X-RAY SOURCE
摘要 PURPOSE:To strengthen emitted X-rays by using a capacitor bank pinched with multiple ceramic capacitors between parallel conductive plates and arranging a discharging electrode near the parallel conductive plates. CONSTITUTION:Ceramic capacitors 20a... are pinched in sandwiches between multiple conductive plates 21, 21, 22 respectively to form a disk-shaped capacitor bank centering a discharge device 5. A discharge switch 4 is provided near the conductive plates 21, 22 and formed into a coaxial shape to reduce the inductance. When the ceramic capacitors 20a... are discharged, the circuit becomes a distributed constant circuit, and the discharge current wave-form with the quick rising time can be obtained. Since the plasma generated between electrodes 11, 12 can be strongly pinched in a short time according to this constitution, strong X-rays can be obtained.
申请公布号 JPS63308896(A) 申请公布日期 1988.12.16
申请号 JP19870143132 申请日期 1987.06.10
申请人 HITACHI LTD 发明人 ARITA HIROSHI;KUROSAWA YUKIO;SUZUKI KOJI;TOKUYAMA SHUNJI
分类号 H05G2/00;H01J35/22;H01L21/027;H01L21/30;H05G1/00 主分类号 H05G2/00
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