| 摘要 |
PURPOSE:To stably obtain the titled high-quality and pore-free ceramics having excellent strength and surface wave characteristics as well as high density, by subjecting piezoelectric ceramic to HIP treatment in an inert gas atmosphere kept under specific conditions and then subjecting the treated ceramics to HIP treatment under the above-mentioned inert gas atmosphere increased only in pressure. CONSTITUTION:Piezoelectric ceramics containing lead zirconate and lead titanate as main components are subjected to HIP treatment at <=100kg/cm<2> pressure and 800-1,200 deg.C in an inert gas atmosphere to afford a primary sintered compact, which is then subjected to HIP treatment in inert gas atmosphere having the same temperature range as the above-mentioned range and increased to <=1,000kg/m<2> only in pressure to provide the titled high-quality ceramics free from peeling and breakage of surface layer in oxidation treatment process. |
