PRODUCTION OF THIN METALLIC FILM

摘要

PURPOSE:To prevent the thermal damage of a high-polymer substrate in a vapor deposition part and to prevent wrinkling after passage through the vapor deposition part by setting the potential difference between a thin metallic film surface and a can in the position where the high-polymer substrate parts from the can at the value smaller than the potential difference between the thin metallic film surface and the can in the vapor deposition position. CONSTITUTION:The potential difference between the thin metallic film surface and the can 3 in the position where the high-polymer substrate 2 parts from the can 2 is set smaller than the potential difference between the thin metallic film surface and the can 3 in the vapor deposition position to decrease the electrostatic attraction between the substrate 2 and the can 3 after the passage through the vapor deposition part and to simultaneously apply the sufficient electrostatic attraction between the substrate 2 and the can 3 to the vapor deposition part. Both the thermal damage of the high-polymer substrate 2 in the vapor deposition part and the wrinkling of the high-polymer substrate 2 after the passage through the vapor deposition part are thereby prevented.