发明名称 CIRCUIT SUBSTRATE
摘要 PURPOSE:To form a bump having a complete shape at the tip part of a finger, and obtain a sure direct junction between the bump and a semiconductor ele ment, by making the width of the finger tip part for forming the bump differ from the other parts of the finger. CONSTITUTION:In a circuit substrate wherein a bump 2 is formed at a finger 1 tip part, the width of the finger 1 tip part is made different from the other of the finger 1. That is, the bump 2 is directly bonded with a pad part of the finger 1 semiconductor element, and the tip part of the finger 1 is made wide. Therefore, the bump 2 having a complete shape can be formed on the finger 1, even if position deviation between the bump 2 and the finger 1 generates at the time of patterning. The sure junction between the bump 2 and the pad part of an semiconductor element is enabled, thereby.
申请公布号 JPS63304635(A) 申请公布日期 1988.12.12
申请号 JP19870139288 申请日期 1987.06.03
申请人 SEIKO EPSON CORP 发明人 HIRANO SHIGERU
分类号 H01L21/60 主分类号 H01L21/60
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