| 摘要 |
<p>PURPOSE:To convey a transfer base in a dust-free state or in a vacuum by placing the transfer base having a magnet on a transfer passage including a superconductor, and levitating the base by a repelling force due to Meissner effect. CONSTITUTION:When a chucking electromagnet 8 under a superconductor 6 is energized, its magnetic field exceeds the critical magnetic field of the superconductor 6 in a transfer passage 9, its superconducting state is broken, and a transfer base 2 loses its levitating force, and attracted to the surface of a thin stainless steel plate 4 by the magnetic field generated from the electromagnet 8. When the base 2 is moved, the magnetic flux of a permanent magnet 3 buried in the base 2 is first detected by a Hall element 11 to detect the position of the base 2, an electromagnet 10 is suitably energized in response to the position detection signal to move the base 2. Thus, since it uses neither gas nor mechanical driver, it can be transferred in a dust-free state or in a vacuum.</p> |
