| 摘要 |
PURPOSE:To efficiently fill paste in all through holes by inserting an organic film between a green sheet and a vacuum table, and sucking paste through the film to be filled in the holes. CONSTITUTION:A green sheet 1 which is completely opened in a state a Mylar film 2 is bonded is placed through a finely porous organic film 6 on a vacuum table 3, and paste 5 filled by a stage 7 above the film 2 is sucked by sucking holes 3-1-3-n arranged on the table 3. Then, when air is externally discharged from the sucking holes arranged on the table 3, the paste 5 is fed via the holes 2-1-2-n of the film 2 and the through holes 1-1-1-n of the sheet 1 to an organic film 6, interrupted by the film 6, and filled in the holes 1-1-1-n. Thus, the paste can be completely filled in all the through holes, and the paste is not oozed on the rear face of the green sheet.
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