| 摘要 |
PURPOSE:To control accurately the temp. in a chamber in a wide temp. range by selecting a reference resistance connected to a thermistor in series, detecting the temp. in a storage chamber, and controlling the amount of power conduction to a heating element. CONSTITUTION:According to each temp. range, the most optimum reference resistance is selected from among reference resistances Rr1, Rr2, Rr3 by switches SW1, SW2, SW3 and connected to a thermistor Rt in series and the partial potential Vout of a direct current voltage E0 is detected. In case of using a SiC thin film thermistor it indicates the relation between resistance and temp. characteristic in a wide range of 0-350 deg.C.
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