VERFAHREN ZUM AUSBILDEN EINES DIAMANTAEHNLICHEN KOHLENSTOFF-FILMS AUF EINEM SUBSTRAT

摘要

There is disclosed a method for depositing a diamond or diamond-like carbon film on at least one substrate employing a hydrocarbon gas and at least one gas which preferentially removes by chemical sputtering other forms of carbon, especially graphite from said film to thereby obtain useful carbon film coated products.