| 摘要 |
PURPOSE:To make the occupying area of a wafer prober small and to reduce the size of the wafer prober, in which a plurality of probe-cards are provided so that automatic change can be performed, by constituting the probe-card so that the probe-card can be mounted or removed through the lower surface of a probe card attaching stage. CONSTITUTION:A stocker 35 for probe-cards 31 is provided in a driving stage 25. A robot hand, which can be freely rotated and moved up and down, is attached to the stocker 35. The probe card 31 is extracted from the stocker 35 by the rotating motion and lifted by a lifting motion. The probe-card is mounted on a probe-card attaching stage 27 through the lower surface of the stage. In a card chuck 29, a hole can be formed so that the probe card 31 is picked up and made to pass between both sides. The probe-card 31 is lifted through the hole part of the card chuck 29 and abutted on the probe-card attaching stage 27. Under this state, the card chuck 29 advances and holds the probe-card 31.
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