| 摘要 |
PURPOSE:To inexpensively obtain a single crystal having good quality, by feeding back diameter of a deposit crystal obtained by processing output signal of plural images extracted in time sharing to temperature and height of the melt using a detector having plural images. CONSTITUTION:A diameter Ds of a grown crystal 22 inversely rotating to a raw material rod 21 is obtained as plural images extracted in time sharing in a camera part 32 which is a detector having plural images. Then in an image processing part 42, e.g. image A is compared with image B in these images to distinguish a stationary part with a motion part and the length in the horizontal direction of boundary obtained by processing is scanned several times to provide a diameter Ds of deposit crystal 22. The signal of the diameter Ds is sent to a control part 35 and compared with reference value or diameter Ds0 before definite time to judge the state of a melt part 23 and sent through a DA converter 36 to a lamp power control part 40, where lamp power is adjusted to control the temperature of melt or gap adjustment is carried out in a gap adjusting part 41 to control a diameter Ds of the grown crystal 22.
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