| 摘要 |
PURPOSE:To make an electric field exert no effect on radiated electron beams and to make evaporation devices and sample devices mountable in plural quantites by forming an aperture on an upper yoke of an object lens in order to pass evaporative particles or ion beams therethrough and disposing the sample device outside an upper magnetic pole piece. CONSTITUTION:An aperture 14a for use in passing evaporative particles or ion beams radiated from a sample processing device therethrough is formed on an upper yoke of an object lens, and a sample device is disposed outside an upper magnetic pole 11. When a sample 21 is set on an optical axis Z and a heating current is made to flow in a filament 24, an evaporative material held on the filament 24 is evaporated and then the evaporative particles 6 pass through the aperture 14a and coat the sample 21. Crystal's growing states varied dependent on differences of samples can be observed accordingly. Since an evaporation device 23 is disposed on a position distant from the optical axis Z, a magnetic field, generated by the heating current flowing in the filament 24, exerts no effect on the electron beams. A plurality of the devices 23 can be disposed around the optical axis Z in such configuration.
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