| 摘要 |
PURPOSE:To improve the performance of an ozonizer, by applying a number of minute protrusions to a surface of a dielectric layer or a metal electrode at the side of discharging gap, thereby lowering the discharge voltage and increasing areal density of the number of discharge columns. CONSTITUTION:Dielectric layers 2 are closely contacted with a pair of metal electrodes 1 and the electrodes are placed in a manner to face the dielectric layers with each other interposing a discharging gap 4 therebetween. A number of small protrusions 5 having a radius of curvature of <=1/3 of the discharging gap length are applied to the surface of the dielectric material 2 contacting with the gap 4 at a number density of >=20/cm<2>. A high AC voltage (50Hz-10 kHz) higher than the discharge initiation voltage is applied to both electrodes 1 with a high-voltage power source 3 to generate discharge in the gap 4 and ozonize an oxygen-containing gas passing through the gap 4.
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