| 摘要 |
PURPOSE:To alleviate any electron beam damage exerted an a sample by arranging an electron beam emitter for TV between a last stage-projection lens and a TEM (an electron microscope) image observation emitter. CONSTITUTION:An electron beam emitter 3 arranged to be demountable from an optical axis and a TV-camera to photograph an electron beam image of the electron beam emitter 3 are provided between a last stage-projection lens 1 and an observation phosphor panel 6. Namely, the electron beam emitter 3 is arranged as demountable at the position closer to the last stage-projection lens 1 than to the observation phosphor panel 6 or a film 7. An extremely bright TV image is, thus, obtained if electron beams with the same intensity are radiated on a sample. Accordingly, any damage to the sample can be alleviated.
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