| 摘要 |
PURPOSE:To obtain a multilayered ceramic board comprising copper conductors without oxidizing the copper at low temperature in a short time, by laminating glass/ceramic based green sheets, on which the copper conductors are printed, and removing binders in a nitrogen atmosphere including a specified amounts of steam and oxygen. CONSTITUTION:A glass/ceramic based green sheet is formed by using a binder including hydrocarbon. A copper conductor layer is printed on said sheet. The sheets are laminated in multiple layers and sintered in an nitrogen atmosphere, in which the partial pressure of steam is controlled at 55-360 mmHg, and the amount of oxygen is controlled at 5-20 ppm. A high density is obtained. Thus a multilayered ceramic substrate, in which the carbon residue of hydrocarbon is not substantially included, is obtained. As the binders, isobutyl methacrylate resin, methyl methacrylate, and a copolymer thereof can be used. |
