发明名称
摘要 PURPOSE:To lower loss voltage in a saturation region, by employing epitaxial type transistor structure which is capable of reducing series resistance applied toward collector side. CONSTITUTION:In a circumferential section of an N type high specific resistance epitaxial layer 2 consisting of a part of a collector region, a region 9 having an extremely low specific resistance and the same electric conduction type as the collector region (epitaxial layer) is formed in the position kept away from outside surface of a P type base region by a distance l equal to thickness of an epitaxial layer 8. And, when impurities contained in the region 9 and a silicon substrate 1 are cut away by high temperature of laser, redispersion takes place to form along surface of the laser cut groove a layer 11 whose resistance is extremely low.
申请公布号 JPS6360552(B2) 申请公布日期 1988.11.24
申请号 JP19800091848 申请日期 1980.07.04
申请人 发明人
分类号 H01L29/73;H01L21/331;H01L29/72 主分类号 H01L29/73
代理机构 代理人
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