| 摘要 |
PURPOSE:To facilitate etching and to improve the yield of a surface acoustic wave resonator or a surface acoustic wave multiplexing mode filter, by forming a grating reflector in an interdigital shape same as an interdigital type electrode. CONSTITUTION:The surface acoustic wave multiplexing mode filter is constituted of a piezoelectric substrate 10, the interdigital type electrodes 11 and 12, and the grating reflectors 13, 14, 15 and 16. In such constitution, the grating reflectors 13, 14, 15 and 16. In such constitution, the grating reflectors 13, 14, 15 and 16 are formed in the interdigital shapes (cross finger shapes) same as the interdigital type electrodes 11 and 12. Therefore, when the interdigital type electrodes 11 and 12 and the grating reflectors 13, 14, 15, and 16 are generated by photo-lithography, the optimum conditions at the time of performing the etching formation of the interdigital type electrodes and the grating reflectors are set equal because they have the similar shapes.
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