| 摘要 |
<p>PURPOSE:To enable uniform mounting of a pellicle frame to a photomask substrate without having clearances, air bubbles, etc., by forming the angle parts of the pellicle frame to a prescribed shape. CONSTITUTION:The pellicle frame 1 is formed of straight parts 1a and arced parts 1b. The parts 1b are formed to such a shape at which the outside peripheral length and the circumferential length are the same. An adhesive agent 3 is spread over the entire surface of a mounting part by this shape at the time of pressing and adhering the frame 1 via the adhesive agent 3 to the photomask substrate 4. The pellicle frame is thus uniformly mounted to the substrate without generating the clearances, air bubbles, etc.</p> |
