| 摘要 |
PURPOSE:To improve machining accuracy without causing any decrease in S/N by canceling torsional motion which is caused by a detection plate around the lengthwise center line of a diaphragm by using a balance piece. CONSTITUTION:Diaphragms 10-1 and 10-2 are driven at a constant frequency to a constant amplitude corresponding to the driving of piezoelectric elements 12-1 and 12-2. In this state, when an angular speed omega is applied in around the lengthwise center axes of the diaphragms, a Coriolis force proportional to the product of the moving speeds of detection plates 14-1 and 14-2 and the angular speed omega is generated at right angles to the main surface of each detection plate, which bends in the opposite direction; and the piezoelectric elements 16-1 and 16-2 detect their bending quantities as variations of charges. The charge variations are converted 28 into voltage variations, which are detected 30 synchronously and smoothed 32 together with the output voltage of a driving circuit 26. In this case, noises of the piezoelectric elements 16-1 and 16-2 by the detection plates 14-1 and 14-2 cancel each other through balance pieces 24-1 and 24-2, so that the S/N of the smoothing output is improved. |
