发明名称 TUNNEL TYPE JOSEPHSON-JUNCTION DEVICE
摘要 PURPOSE:To remarkably reduce the area of a junction and to obtain an element adapted for a high speed switching by forming the weak coupler of a Josephson- junction device of a superconductor oxidized in crystal grain boundary, a normal conductor or a semiconductor. CONSTITUTION:When the crystal grain boundary of the weak coupler 5 of a quasi-flat surface type Josephson-junction device 1 is oxidized, it is operated as a tunnel junction. Then, a weak coupler 5 is formed over upper and lower electrodes across upper and lower sections 2, 3 electrodes of a superconductor formed through an insulating layer, and the side of an insulating layer 4 to form a superconductor oxidized in crystal grain boundary by anodic oxidation, a normal conductor, a semimetal or a semiconductor at the weak coupler. Since a tunnel type Josephson-junction device is determined by the width (c) and the thickness (t) of the coupler in the area of the junction to be extremely reduced, a current density can be increased, an electrostatic capacity can be reduced to obtain an element adapted for a high speed switching, and a critical current value can be easily set and controlled.
申请公布号 JPS63283175(A) 申请公布日期 1988.11.21
申请号 JP19870118345 申请日期 1987.05.15
申请人 RIKAGAKU KENKYUSHO 发明人 OTA HIROSHI
分类号 H01L39/22;H01L39/24 主分类号 H01L39/22
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