| 摘要 |
PURPOSE:To enable high precision positioning by interlocking an auxiliary stage and a main moving stage through a coupling means employing a piezoelectric element then detecting the position of the moving stage and controlling the driving means of the auxiliary stage and the piezoelectric elements. CONSTITUTION:A motor 12 is driven to move an auxiliary stage 1 linearly through a threaded shaft 11 and a nut 10 so as to move a main moving stage 2 interlocked through a coupling means 5. Here, the position of the main moving stage 2 is detected in the order of nano meter through a referential mirror 8 and a laser metering system 9, and a positional error is fed to a control section 15 so as to provide an analog signal proportional to the positional error to an amplifier section 14 thus operating a piezoelectric element 6. Since the piezoelectric element 6 is assembled in a coupling rod 7, the main moving stage 2 is interlocked with expansion/shrinkage of the piezoelectric element 6, and thereby the moving amount of the main moving stage 2 can be finally controlled with an accuracy of the laser metering system 9. |
