| 摘要 |
PURPOSE:To obtain an optical microscope capable of rapidly and safely attaining accurate detection and working by providing the microscope with an eyepiece, a working optical system for radiating a laser beam to an object to be inspected and a shutter device for selectively interrupting any one of a visual optical shutter and a laser beam shutter. CONSTITUTION:An observation optical system 20 is constituted of a common optical system 21, a direct observation optical system 31 and an indirect observation optical system 35. The working optical system 40 is constituted of a laser oscillator 41, a mirror 42, a beam splitter 24, a 2nd beam splitter 43 and a 3rd beam splitter 45 to make a working laser beam incident from a direction different from a reference optical axis P1 and to radiate the object to be inspected. The shutter device 50 is constituted of the laser beam shutter 71 and the visual light shutter 81 to selectively interrupt any one of direct observation light to be visual light having an optical axis P2 and a laser beam having an optical axis P4. Since the eyepiece can be prevented from the incidence of harmful laser beams, an object can be safely observed and checked and working can be rapidly executed. |
