| 摘要 |
PURPOSE:To obtain a good ceramics protective film having no pinholes by accelerating the cluster ions of a compd. obtd. by adiabatically expanding the vapor of a ceramics compd. by an electric field and depositing the same by evaporation on a substrate. CONSTITUTION:The ceramics compd. which is the ceramics protective material or the metallic element components thereof are evaporated in a crucible 30 to form the vapor which is adiabatically expanded by a nozzle 40 to form the clusters of the metal elements or the compd. The clusters are then ionized by using an electron releasing filament 34 and an electron leading-out grid 33. The cluster ions of the metal elements are brought into reaction with a reactive gas and are converted to the cluster ions of the compds. The resulted cluster ions of the compd. are accelerated by the electric field generated by the accelerating electrode 35 and are deposited by evaporation on the substrate 1. The ceramics protective layer having no pinholes is thereby obtd. |
