| 摘要 |
PURPOSE:To obviate generation of unequality in development and film thickness of a disk-shaped master disk by coating a discharge port for a developing soln. with a porous body. CONSTITUTION:The master disk 2 is fixed onto a turn table 1. The discharge port 5 provided with many fine pores on the surface is coated with the porous body 6 having a surface parallel with the surface of the master disk 2 and is disposed above the master disk. The developing soln. flowing out of the discharge port 5 passes the fine pores of the porous body 6 and flows uniformly over the entire surface of the master disk 2. The generation of the unequality in the development and film thickness by the nonuniform flow is thereby obviated and since the unequal development by air bubbles is forbidden, the master disk having high quality is manufactured at a high yield. |
