| 发明名称 |
Amorphous silicon ionizing particle detectors |
| 摘要 |
Amorphous silicon ionizing particle detectors having a hydrogenated amorphous silicon (a-Si:H) thin film deposited via plasma assisted chemical vapor deposition techniques are utilized to detect the presence, position and counting of high energy ionizing particles, such as electrons, x-rays, alpha particles, beta particles and gamma radiation.
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| 申请公布号 |
US4785186(A) |
申请公布日期 |
1988.11.15 |
| 申请号 |
US19860921302 |
申请日期 |
1986.10.21 |
| 申请人 |
XEROX CORPORATION |
发明人 |
STREET, ROBERT A.;MENDEZ, VICTOR P.;KAPLAN, SELIG N. |
| 分类号 |
G01T1/24;H01L31/0232;H01L31/0376;H01L31/117;H01L31/118;(IPC1-7):G01T1/24 |
主分类号 |
G01T1/24 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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