| 摘要 |
PURPOSE:To enable production of perfect high-purity AlN powder, by carrying out reaction in plural stages and repeatedly reacting Al powder with N2 gas in carrying the Al powder on an N2 gas stream and introducing the gas stream of the suspended Al powder into a thermal reaction tube for the reaction. CONSTITUTION:Al powder is charged from an inlet 6 into a vessel 4 in a feed part (A) of the first-stage reactor 1 and N2 gas is introduced from a feed pipe 5 to replace the internal air with the N2 gas and suspend the Al powder with the N2 gas. The Al powder is carried on the N2 gas stream and successively conveyed into a reaction tube 8 heated by a heater 9 and the Al powder is reacted with the N2 gas in the flow process in the reaction tube 8 to produce complete nitriding from the nitriding in the surface part and simultaneously achieve fine dividing of the AlN powder. In the process, since the unreacted Al powder sometimes partially remains, it is introduced into the second-stage reactor 2 and dampers (6b) and 13 are closed to form a circulation circuit and the above-mentioned reaction treatment is repeated in the afore-mentioned state until perfect AlN powder is formed.
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