| 摘要 |
PURPOSE:To calibrate an instrument simply and easily with high accuracy by setting the decrease rate of a transmitted light quantity signal with the thickness of a body to be measured based upon the extinction coefficient of the body to be measured as a function of the level of the transmitted light quantity signal, and processing this function and setting a calibration curve. CONSTITUTION:Samples Ta, Tb,... are set on an optical path in order and detection signals Ia, Ib,... are obtained respectively to display the calibration curve. If the calibration curve deviates from a segment L, arithmetic processing based upon equations I and II (when n=1) is carried out in a linearizing process. In this case, the power number (n) in the equations is so set that the correlation coefficient between calculated values (ta', tb',...) and real values ta, tb,... of thickness is maximum. When the linearizing process is finished, the thickness values ta' and tb' of the respective samples Ta and Tb are recalculated again to set a calibration curve. Then the quantity Ii of transmitted light of the body Ti to be measured is measured and its thickness ti is measured automatically by using said calibration curve.
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