DIAMOND PROBE

摘要

PURPOSE:To obtain a hard and sharp probe tip by laminating diamond grains having electrical conductivity to the part of a metallic bar having a sharp pointed tip. CONSTITUTION:A rod wire such as stainless steel wire having about 1mm diameter or tungsten wire having about 0.3mm diameter is cut to an arbitrary length and the tip thereof is mechanically or electrolytically polished to prepare a metallic part 1 of the probe. This probe is placed in a gaseous mixture composed of hydrogen, gaseous methane and diborane and the diamond grains 2 are laminated and deposited thereon by using the nonpolar discharge of about 2.45GHz microwaves. After the surface of the diamond grains 2 is subjected to sputter cleaning, chromium is ion-implanted by about 150kv acceleration voltage. The grains deposited in such a manner are analyzed by the Raman scattered spectra of the laser to confirm that the grains are the diamond grains. The electrical conductivity is checked by measuring the resistance value. The shape condition at the microtip is observed by a scanning electron microscope.