| 摘要 |
PURPOSE:To obtain a transparent conductive film suitable for improving a photoelectric element in photoelectric conversion efficiency by a method wherein a transparent conductive film, which is formed of tin oxide as main component containing fluorine, is provided on a transparent conductive film which is formed of tin oxide as main component not containing fluorine and built on a transparent substrate. CONSTITUTION:Tin compound not containing halogen except chlorine is brought into contact with a transparent substrate heated at high temperature or tin compound not containing halogen is brought into contact with the compound containing chlorine such as HCl or the like for inducing a thermal decomposition oxidation reaction so that an SnO2:Cl film is formed on the transparent substrate. Next, the transparent substrate with the SnO2:Cl formed on its surface is subjected to heating for contacting the compound containing tin oxide and fluorine to induce a thermal decomposition oxidation reaction so that SnO2 film is deposited on the SnO2:Cl film for the formation of the transparent conductive film of two-layered film structure. Therefore, the transparent conductor can be obtained which is equal in transmittance and small in area resistance as compared with a two-layered film which has the same ratio of SnO2:F film thickness to the whole film thickness. By these processes, a photoelectric element can be improved in conversion efficiency.
|
