发明名称 DEVICE FOR SUPPORTING SEMICONDUCTOR CRYSTAL ROD
摘要 PURPOSE:To obtain a small-sized compact supporting device capable of surely and vertically supporting a single crystal rod, by providing a movable ring, locking means and driving means for the ring and combining them so that they may perform specific function. CONSTITUTION:A movable ring 10 is lifted to initially bring a noncircular hole 11 perforated therein into contact with a conical part (15a) of a single crystal rod 15 at one point (a). The movable ring 10 is further lifted to move in the direction to fill a clearance between the noncircular hole 11 and the conical part (15a), since the movable ring 10 is movable in the horizontal direction. Thereby automatic aligning is carried out there. As a result, the noncircular hole 11 of the movable ring 10 contacts the conical part (15a) of the single crystal rod 15 at three points (a), (b) and (c). A support ring 6 is then lifted to compress springs 7... elastically supporting the movable ring 10, which cannot be further lifted. The movable ring 10 closely adheres to the top surface of the support ring 6 to lock the movement thereof. The conical part (15a) of the single crystal rod 15 is surely and vertically supported there.
申请公布号 JPS63270383(A) 申请公布日期 1988.11.08
申请号 JP19870103820 申请日期 1987.04.27
申请人 SHIN ETSU HANDOTAI CO LTD 发明人 IKEDA YASUHIRO;MIZUISHI KOJI
分类号 C30B13/32;C30B13/28 主分类号 C30B13/32
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