| 摘要 |
PURPOSE:To attain a higher printing density, by a method wherein of a stainless steel plate provided with grooves and a smooth stainless plate jointed to the stainless steel plate, at least the parts corresponding to a compression chamber are jointed by diffusion bonding of metals. CONSTITUTION:A photoresist film 41 is provided on a specularfinished metallic substrate 40 by coating, and is exposed to light in a desired pattern, followed by leaving only a required part of the film 41 while removing the other parts of the film 41. Next, the substrate is etched at parts where the photoresist is absent, thereby forming recessed parts (ink jet nozzle parts) 43, and the photoresist is completely removed to obtain a lower substrate. Then, bonding surfaces of the lower substrate 40 and a specular-finished metallic upper substrate 42 are matched with each other, and diffusion bonding is effected by heating under a gas pressure, whereby molecular diffusion of metals is caused, and the metals are bonded to each other without being melted, so that an objective head can be produced without loss of the ink jet nozzle parts 43. For example, substrates 61, 63 and a thin sheet 62 set therebetween are bonded to each other by diffusion bonding, and piezoelectric elements 64a-64d are mounted on the substrates 61, 63 at parts corresponding to compression chambers communicating with nozzles. |
