| 摘要 |
PURPOSE:To produce high melting point metal having fine grain size or fine alloy powder under high efficiency and high productivity by charging the powder of high melting point metal or alloy into DC arc-high frequency fixed type plasma under argon-hydrogen atmosphere, vaporizing and condensing. CONSTITUTION:The powder of high melting point metal of tungsten, etc., or the alloy is introduced to DC air gun 1 by using inert gas of argon, etc., as carrier gas. It is desirable that the powder of the above metal, etc., is introduced under condition of <= about 20 mum and desirably <=10 mum grain size at about 20 g/l concn. By this method, the above powder is charged into the DC arc plasma under argon-hydrogen atmosphere-high frequency plasma complex type plasma in a water cooled quartz tube 2 winding a water cooled copper pipe 3 for generating high frequency plasma connected with the DC arc gun 1. Here, the above metal is vaporized and condensed in the stainless steel reaction vessel 4 and the fine powder of high melting point metal or alloy having <= about 0.1mum is formed and recovered.
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