发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To prevent the breaking of a bump electrode, and to improve reliability by transferring a conductive resin film onto a wiring pattern for a substrate, forming the bump electrode and fixing the joining section of the bump electrode and a semiconductor element with an insulating resin. CONSTITUTION:A conductive resin film 3 is placed onto a substrate 1 with a wiring pattern 2. Only sections to which bumps are shaped are irradiated with laser beams 4. When the film 3 is peeled, a resin is transferred only to the sections as the bumps. A photo-setting type insulating resin 5 is applied onto a section on which a semiconductor chip is loaded, a semiconductor element 6 is contact-bonded, and the resin is cured by irradiation from a lower section of ultraviolet rays. A conductive resin is applied to electrodes on the semiconductor element through the same method, and the bumps are shaped and joined onto the wiring pattern through the same method. Accordingly, the breaking of the electrodes is prevented, thus improving reliability.
申请公布号 JPS63262846(A) 申请公布日期 1988.10.31
申请号 JP19870097945 申请日期 1987.04.21
申请人 SEIKO EPSON CORP 发明人 MIYASAKA HITOSHI
分类号 H01L21/60;H05K1/09;H05K3/04;H05K3/24 主分类号 H01L21/60
代理机构 代理人
主权项
地址