| 摘要 |
PURPOSE:To enable movement of a driven body in any direction of the surface directions, by arranging magnetic poles of at leat one part of stators or movable elements of a linear motor in the orthogonal directions to the magnetic pole arrangement of the movable elements or the stators. CONSTITUTION:The stator magnetic poles 5x and 5y of a linear motor are arranged on the upper surface of a fixed table 2 and the stator magnetic poles 5x are all arranged in the X-direction, while the stator magnetic poles 5y are arranged in the Y-direction. On the other hand, the movable element magnetic poles 6y and 6x, which are arranged mutually in the orthogonal directions to the stator magnetic poles 5x and 5y, are provided on the under surface of a movable table 4 and the movable magnetic poles 6y intersect the stator magnetic poles 5y at right angles, while the 6x intersect 5y at right angles. A movable table 4 is driven in the X or Y direction respectively when the movable table 4 is required to move in the X-direction by mutual magnetic interaction of the stator magnetic poles 5y and the movable element magnetic piles 6x, while the movable table 4 is required to move in the Y-direction by the mutual magnetic interaction of the stator magnetic poles 5x and the movable element magnetic poles 6y. Thereby, a driven body can be moved in a desired direction of surface directions.
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